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《中国物理快报:英文版》
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2009年3期
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Physical and Chemical Properties of TiOxNy Prepared by Low-Temperature Oxidation of Ultrathin Metal Nitride Directly Deposited on SiO2
Physical and Chemical Properties of TiOxNy Prepared by Low-Temperature Oxidation of Ultrathin Metal Nitride Directly Deposited on SiO2
(整期优先)网络出版时间:2009-03-13
作者:
韩跃平;韩炎
理学
>物理
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中国物理快报:英文版
2009年3期
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Physical and Chemical Properties of TiOxNy Prepared by Low-Temperature Oxidation of Ultrathin Metal Nitride Directly Deposited on SiO2
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