摘要
Asurfacechargemeasuringsystemusingthecapacitiveprobemethodisanalysed.Thepresentstudyshowsthatthemeasuringsystemcannothaveasteady-stateoutputandthattheerrorresultingfromthefiniteleakageresistanceofthemeasuringsystemwillbeaccumulatedduringthemeasuringprocess.Basedonthetheoreticalanalysisanewtypeprobewithalowchargeleakageandhighresolutionisdesigned.ThesurfacechargeaccumulatedontheTefloninsulatorunderaDCvoltageismeasuredusingthisnewprobeandsomephenomenaofthesurfacechargingarereported.
出版日期
2006年05月15日(中国期刊网平台首次上网日期,不代表论文的发表时间)