摘要
Alowpoweratmosphericpressureplasmajetdrivenbya24kHzACpowersourceandoperatedwithaCH4/airgasmixturehasbeeninvestigatedbyopticalemissionspectrometer.Theplasmaparametersincludingtheelectronexcitationtemperature,vibrationaltemperatureandrotationaltemperatureoftheplasmajetatdifferentdischargepowersarediagnosedbasedontheassumptionthatthekineticenergyofthespeciesobeystheBoltzmanndistribution.TheelectrondensityatdifferentpowerisalsoinvestigatedbyHβStarkbroadening.Theresultsshowthattheplasmasourceworksundernon-equilibriumconditions.Itisalsofoundthatthevibrationaltemperatureandrotationaltemperatureincreasewithdischargepower,whereastheelectronexcitationtemperatureseemstohaveadownwardtrend.Theelectrondensityincreasesfrom0.8×1021m-3to1.1×1021m-3whenthedischargepowerincreasesfrom53Wto94W.
出版日期
2015年03月13日（中国期刊网平台首次上网日期，不代表论文的发表时间）
