摘要
Electrondensity(Ne)inaglowdischargeplasmaforthesurfacealloyingtechniqueisdiagnosedbyopticalemissionspectrometry(OES).WithCH_4asthefeedinggas,NeisobtainedbycomparingtheHβspectrumaccordingtotheStarkbroadeningeffect.ItisnoticedthatNevarieswiththeworkingpressures(30Pato70Pa)andcathodevoltages(500Vto1000V),respectively.Duetoanabnormalglowdischarge,Neisbetween1.71×10~(15)/cm~3to6.64×10~(15)/cm~3andincreasesrapidlywithworkinggaspressuresandcathodevoltages.TheresultsshowthatOESisausefulmethodtomeasuretheplasmaparametersinasurfacealloyingglowdischargeplasma.
出版日期
2006年04月14日（中国期刊网平台首次上网日期，不代表论文的发表时间）
