摘要
Thedeformablemirrorwiththesizeof410mmstackswasdeveloped.Theresults×468mmcontrolledbythebimorphpiezoceramicplatesandmultilayerpiezoceramicofthemeasurementsoftheresponsefunctionsofalltheactuatorsandofthesurfaceshapeofthedeformablemirrorarepresentedinthispaper.ThestudyofthemirrorwithaFizeauinterferometerandaShack–Hartmannwavefrontsensorhasshownthatitwaspossibletoimprovetheflatnessofthesurfacedowntoaresidualroughnessof0.033μm(RMS).Thepossibilityofcorrectionoftheaberrationsinhigh-powerlaserswasnumericallydemonstrated.
出版日期
2016年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
