摘要
Inordertosolvetheproblemofhighprecision,completeelectricinsulatingdetectionofthepressuremeasuringsystem,wehavedevelopedthethree-beaminterferometer.Inthispaper,theoperationprinciple,structureofthesystemandmeasuringresultsaregiven.
出版日期
1997年01月11日(中国期刊网平台首次上网日期,不代表论文的发表时间)